Contactless Measurement of Carrier Lifetime in Semiconductor Wafers by Use of Strip Lines

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1980-11-05

著者

• Ogita Yoh-ichiro

  Department of Electrical Engineering, Ikutoku Technical University

• Ogita Yoh-ichiro

  Department Of Electrical Engineering Ikutoku Technical University

関連論文

• Contactless Measurement of Short Carrier Lifetime in Heat-Treated N-Types Silicon
• Contactless Measurement of Carrier Lifetime in Semiconductor Wafers by Use of Strip Lines

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