Effect of Heat Treatment on the Coefficient β_<pf> for the Poole-Frenkel Effect and the Conductivity in Ta_2O_5 Films

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概要

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• The change in the coefficient β_<pf> for the Poole-Frenkel effect and the change in the conductivity in anodized Ta_2O_5 films by heat treatment have been observed. Untreated films (dried at room temperature) include only neutral traps, so that the film does not exhibit the Poole-Frenkel effect and has very low conductivity. When these films are heat-treated for a few minutes in oxygen or in a vacuum, donor levels are created in the films. These films increase in conductivity by about 10^4 times and exhibit the Poole-Frenkel effect. When the films are heat-treated for over 10 minutes in oxygen, the conductivity decreased again. In this decreasing process, the value of β_<pf> changed from that of an anomalous Poole-Frenkel effect into the normal one. These chances may be caused by the change in the ratio N_d (donor density)/N_t (trap density) and in the energy of the donor levels.

• 社団法人応用物理学会の論文
• 1980-01-05

著者

• Matsumoto Hironaga

  Faculty Of Engineering Meiji University

• Suzuki Akitoshi

  Faculty Of Engineering Meiji University

• YABUMOTO Tadaichi

  Faculty of Engineering, Meiji University

• Yabumoto Tadaichi

  Faculty Of Engineering Meiji University

関連論文

• Effect of Heat Treatment on the Coefficient β_ for the Poole-Frenkel Effect and the Conductivity in Ta_2O_5 Films
• DC Electroluminescence on M-I-S Structures in Thin Films
• The Light Emission by Injected Electrons in Electroluminescent Thin Films with Insulating Layer
• DC Electroluminescence of ZnS:TbF_3 Thin Films

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