A Monte Carlo Calculation of High-Enervgy Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
Sputtering processes of high-energy incident ions are calculated numerically by using the Monte Carlo method under the assumptions of random arrangement and no inelastic collisions.In the high-energy region, the unscreened Coulomb potential is used, while the hard-sphere type is adopted in the low-energy region. The simulation has been performed for the bombardment by deuterons with energies of 20 keV to l MeV on a silver target. The calculated sputtering ratios agree well with the experimental values. On the basis of these results a new formula for the sputtering ratio is derived by modifying Pease's formula.
- 社団法人応用物理学会の論文
- 1977-04-05
著者
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ONAKA Takashi
Department of Astronomy, School of Science, The University of Tokyo
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Onaka Takashi
Department Of Astronomy Faculty Of Science University Of Tokyo
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Onaka Takashi
Department Of Astronomy University Of Tokyo
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KAMIJ0 Fumio
Department of Astronomy, University of Tokyo
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Kamij0 Fumio
Department Of Astronomy University Of Tokyo
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