Al^<26> Diffusion in SiO_2 of Integrated Circuits
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1976-09-05
著者
-
Walsoe De
Citefa (the Argentine Armed Forces Institute For Scientific And Technological Research):conicet (nat
-
Franco J.
Facen (uba) (faculty Of Exact And Natural Sciences University Of Buenos Aires)
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CAVANAGH E.
SENID (Naval Research and Development Center)
関連論文
- A New Solid State Cell with LiI as Solid Electrolyte : Chemistry (incl. physical process)
- Al^ Diffusion in SiO_2 of Integrated Circuits
- Reaction between Aluminium and SiO_2 in Integrated Circuits