Interactions of Si(111) Surfaces with Oxygen by Electron Bombardment Surface Ion Desorption Technique

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概要

• 論文の詳細を見る

• A study has been made of the electron bombardment surface ion desorption from Si (111) with oxygen chemisorbed. For 100 eV electrons, the maximum ion yield is estimated to be 〜10^<-7> ions/electron, and the ion energy distribution has a maximum at 4.5 eV with a half width of 6.1 eV. The distribution is quite asymmetrical and extends from zero to 16.1 eV. The threshold energy for desorption of zero-energy ions is 15.7 eV.

• 社団法人応用物理学会の論文
• 1972-09-05

著者

• Nishijima Mitsuaki

  Central Research Laboratory Mitsubishi Electric Co. Ltd.

• Nishijima Mitsuaki

  Central Research Laboratory Mitsubishi Electric Co. Ltd

関連論文

• Identification of Ion Species in the Combined Auger Electron Spectroscopy and Electron Impact Desorption Studies
• Interactions of Si(111) Surfaces with Oxygen by Electron Bombardment Surface Ion Desorption Technique
• Apparatus for Electron Bombardment Surface Ion Desorption Study

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