Apparatus for Electron Bombardment Surface Ion Desorption Study

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概要

• 論文の詳細を見る

• An apparatus is constructed for electron bombardment surface ion desorption study. It has an energy resolution of 3% and sufficient sensitivity to allow the measurements of the ion energy distributions for systems in which the ion yield is approximately 10^<-8> tons per electron or greater. The design of the apparatus and examples of typical measurements are reported.

• 社団法人応用物理学会の論文
• 1972-05-05

著者

• Nishijima Mitsuaki

  Central Research Laboratory Mitsubishi Electric Co. Ltd

関連論文

• Identification of Ion Species in the Combined Auger Electron Spectroscopy and Electron Impact Desorption Studies
• Interactions of Si(111) Surfaces with Oxygen by Electron Bombardment Surface Ion Desorption Technique
• Apparatus for Electron Bombardment Surface Ion Desorption Study

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