Piezoresistive Properties of Polycrystalline Silicon Thin Film

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1972-01-05

著者

• Onuma Yoshiharu

  Faculty Of Engineering Shinshu University

• SEKIYA Kunihiko

  Faculty of Engineering, Shinshu University

• Sekiya Kunihiko

  Faculty Of Engineering Shinshu University

関連論文

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• Silicon Carbide Films Evaporated in Vacuum on Synthetic Micas
• Carbon Fibers Obtained by Thermal Decomposition of Vaporized Hydrocarbon
• Electrical Properties and Piezoresistance Effects of Evaporated Lead Telluride Thin Films
• Piezoresistive Properties of Polycrystalline Silicon Thin Film
• Thermo-Couple Consisted of Germanium Thin Film Deposited in Vacuum

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