Fabrication and recording chracteristics of sputter-deposited ferrite thin film disks (マルチメディアストレージ--第5回アジア情報記録技術シンポジウム〔英文〕)

概要

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M-type Ba ferrite (BaM) disks were prepared on Pt and Pt-Ta underlayers using facing targets sputtering apparatus. Pt underlayers are more stable and more effective than ZnO underlayers to promote the c-axis orientation of BaM layers deposited on them, especially for extremely thin BaM films. Pt-Ta underlayer was used to decrease the grain size of BaM layers deposited on them. BaM/Pt-Ta disks revealed larger S/N ratio than BaM/Pt disks because of their larger signal output and lower media noise level. BaM disks with 50 nm thick BaM layers revealed lower noise level and larger S/N ratio than that with 100 nm thick BaM layers due to smaller grain size.
社団法人映像情報メディア学会の論文
2000-11-14