14-3 Reduction of Trap State Density and Improvement of Reliability in Poly-Si TFTs by In-situ Fluorine Passivation(4.Session 14:AMLCD 2)
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- 論文の詳細を見る
- 社団法人映像情報メディア学会の論文
- 1999-11-05
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関連論文
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- 14-3 Reduction of Trap State Density and Improvement of Reliability in Poly-Si TFTs by In-situ Fluorine Passivation(4.Session 14:AMLCD 2)