高抵抗率ZrN薄膜の特性と感熱記録ヘッドへの適用

概要

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A ZrN thin-film resistor is proposed as a promising heating resistor for a thermal printing head used in high-resolution high-speed printing. The ZrN film is prepared by nonreactive sputtering with a hot-pressed ZrN target. Practical films, which have a small resistance change with temperature as well as during aging tests, are provided with resistivities of 0.5 to 5 mohm・cm. B7 size and 16-dot/mm resolution thermal printing heads, installed with driver LSI's, are fabricated to examine the applicability for high-speed printing. The results of performance tests provide the possibility that the heads are able to operate with speed below 1 msec/line.