Study on Glass-Metal Bonding by Anodic Bonding

概要

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Anodic bonding of glass and Si, which is performed by applying positive voltage of several hundred volts on Si, is well known as Malloy sealing process and has been in practical use. However, anodic bonding of glass and metal has not been comprehensively investigated and mechanism of the bonding has not been well understood. A fundamental study on anodic bonding of borosilcate glass and metal was carried out. Glass to Mo bonding and glass to Al bonding were successfully made, and glass to 304ss, Ti, Ni and Au bondings were also made but they fractured at low stress level. Bonding test of glass and Mo using the design of experiment was carried out in order to specify dominant bonding parameters. Then, it has become clear that the bonding temperature and the applying voltage should be dominant. Microscopic observations and chemical analysis were performed for a glass-to-Mo bonded structure. Result of ESCA analysis revealed that Na, which was not found around the bourtdary, was detected in glass near thte anode and Mo oxide was detected in glass near the boundary. Based on the results, it has been considered that metal ions would diffuse into glass substituting for Na^+ and metal oxide would be formed, then glass to metal bonding should be achieved.
社団法人溶接学会の論文
1993-10-01