Mode Characteristics of Half-Spherical Vertical-Cavity Surface-Emitting Laser : Transverse Mode Control of Surface Emitting Lasers by Introducing Curved Mirror

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概要

• 論文の詳細を見る

• In recent years, commercial applications of vertical-cavity surface-emitting laser(VCSEL)s are beginning to show up owing to rapid improvement of major characteristics. However, the requirement of high power fundamental mode operation in VCSELs has been highly restricted, because of the limitation in the mode size enhancing, which is originated from the structure of conventional VCSELs. So, in this paper, we demonstrated curved-surface integrated VCSELs for enlarged fundamental mode size. Stable single transverse mode operation is achieved from curved-mirror VCSELs at 850-nm, 980-nm using epoxy microlens frame and Bromium microlens etching, respectively. In the 850-nm VCSELs, by including gain-producing layers inside the bottom DBR, we remove unnecessary multi-cavity effect. With continuous wave optical pumping at 663 nm, single mode power up to 7 mW is observed at room temperature. When pumped near the center of the curved mirror made of optical epoxy, the device operates in a single transverse mode reliably. The diameter of the fundamental mode is generally larger than 10 μm. As the pump position moves away from the center, lasing from higher-order modes is observed. And also, in the 980-nm VCSELs, microlens structure is inscribed on top surface of 5-μm GaAs cap layer by using bromium wet etching solution. The optimized condition for operating fundamental mode easily at the current injection range is about 244 〜 300 μm of radius of curvature and 15〜18 μm of current guiding oxide aperture. We obtained single fundamental mode laser at some adequate current range, and the cavity mode spectrum in this device has a similarity of previous 850-nm curved mirror VCSELs.

• 社団法人電子情報通信学会の論文
• 2003-12-11

著者

• Lee Yun-hi

  Electronic Materials And Devices Research Center Korea Institute Of Science And Technology

• Lee Y‐h

  Faculty Of Physics Korea Advanced Institute Of Science And Technology

• Lee Yong-hee

  Faculty Of Physics Korea Advanced Institute Of Science And Technology

• KIM Kyu-Sang

  Faculty of Physics, Korea Advanced Institute of Science and Technology

• Kim Kyu-sang

  Faculty Of Physics Korea Advanced Institute Of Science And Technology

関連論文

• Novel Bonding Technology for Hermetically Sealed Silicon Micropackage
• Emission Characteristics of the Molybdenum-Coated Silicon Field Emitter Array
• Mode Characteristics of Half-Spherical Vertical-Cavity Surface-Emitting Laser : Transverse Mode Control of Surface Emitting Lasers by Introducing Curved Mirror
• Mode Characteristics of Half-Spherical Vertical-Cavity Surface-Emitting Laser : Transverse Mode Control of Surface Emitting Lasers by Introducing Curved Mirror

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