NDE of Semiconductor Samples and Photovoltaic Devices with High Spatial Resolution Utilizing SQUID Photoscanning(<特集>Special Issue on Superconductive Electronics)
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概要
- 論文の詳細を見る
SQUID (Superconducting QUantum Interference Device) Photoscanning is an analytical technique intended for the noninvasive evaluation of semiconductor wafers and device structures. This method is based on the detection of the magnetic field of photocurrents locally induced in the sample under investigation by a focused laser beam. The magnetic field is monitored by means of a sensitive SQUID magnetometer while scanning the sample surface with the laser beam. Doping inhomogeneities in electronic grade silicon, grain boundaries in solar silicon, and defects in photovoltaic device structures have been analyzed.
- 社団法人電子情報通信学会の論文
- 2002-03-01
著者
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Riemann Helge
Institut Fur Kristallzuchtung
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Ludwig F
Physikalisch-technische Bundesanstalt
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Beyer J
Physikalisch-technische Bundesanstalt
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Ludge Anke
Institute of Crystal Growth
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SCHURIG Thomas
Physikalisch-Technische Bundesanstalt
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BEYER Jorn
Physikalisch-Technische Bundesanstalt
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DRUNG Dietmar
Physikalisch-Technische Bundesanstalt
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LUDWIG Frank
Physikalisch-Technische Bundesanstalt
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Ludge Anke
Institut Fur Kristallzuchtung
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Drung D
Physikalisch-technische Bundesanstalt
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