E-Beam Static Fault Imaging with a CAD Interface and Its Application to Marginal Fault Diagnosis (Special Issue on LSI Failure Analysis)

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概要

• 論文の詳細を見る

• A new image-based diagnostic method is proposed for use with an E-beam tester. The method features a static fault imaging technique and a navigation map for fault tracing. Static Fault imaging with a dc E-beam enables the fast acquisition of images without any additional hardware. Then, guided by the navigation map derived from CAD data, marginal timing faults can be easily pinpointed. A statistical estimation of the average count of static fault images for various LSI circuits shows that the proposed method can diagnose marginal faults by observing less than thirty faulty images and that a faulty area can be localized with up to five times fewer observations than with the guided-probe method. The proposed method was applied to a 19k-gate CMOS-logic LSI circuit and a marginal timing fault was successfully located.

• 社団法人電子情報通信学会の論文
• 1994-04-25

著者

• Kuji Norio

  Ntt Lsi Laboratories

• Matsumoto Kiyoshi

  NTT LSI Laboratories

関連論文

• Cone/Block Methods for Logic Simulation Time Reduction in E-Beam Guided-Probe Diagnosis (Special Issue on LSI Failure Analysis)
• E-Beam Static Fault Imaging with a CAD Interface and Its Application to Marginal Fault Diagnosis (Special Issue on LSI Failure Analysis)

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