Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation (Special lssue on SISPAD'99)

スポンサーリンク

概要

• 論文の詳細を見る

• Appropriate meshes are crucial for accurate and efficient 3D process simulation. In this paper, we present a set of tools operating on surface and interface triangulations. These tools allow the improvement of the accuracy of interfaces, the reduction of the number of triangles, and the removal of obtuse not coplanarily compensated triangles. The first tool is used within integrated topography simulation environments based on different data structures, e. g. cell-based and segment-based. The latter two are particularly important for providing appropriate input to mesh generation for 3D process simulation.

• 社団法人電子情報通信学会の論文
• 2000-08-25

著者

• Bar Eberhard

  The Fraunhofer Institut Fur Integrierte Schaltungen Bauelementetechnologie

• Lorenz Jurgen

  the Fraunhofer Institut fur Integrierte Schaltungen, Bauelementetechnologie

• Lorenz Jurgen

  The Fraunhofer Institut Fur Integrierte Schaltungen Bauelementetechnologie

関連論文

• Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation (Special lssue on SISPAD'99)
• A Computationally Efficient Method for Three-Dimensional Simulation of Ion Implantation (Special lssue on SISPAD'99)

スポンサーリンク