Database with LSI Failure Analysis Navigator (Special Issue on Scientific ULSI Manufacturing Technology)

概要

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A database system that provides step-by-step guidance for LSI failure analysts has been developed. This system has three main functions: database, navigator, and chip tracking. The database stores failure analysis information such as analysis method and failure mechanisms including image data. It also stores conditions and results of each analysis step and decisions to proceed to the next analysis step. With 2000 failure analysis cases, data retrieval takes 6.6 seconds, a table containing 20 photos is presented in 6.5 seconds, and a different set of data can be displayed in 0.6 seconds. The navigator displays a standard analysis procedure illustrated in flow charts. The chip tracking shows where the particular chip is and what analysis it is undergoing, which is useful for the situation where many chips are simultaneously analyzed. Thus, this system has good enough functions of analysis procedure management and performance of quick data access to make failure analysis easier and more successful.
社団法人電子情報通信学会の論文
1996-03-25