Colored Timed Petri-Nets Modeling and Job Scheduling Using GA of Semiconductor Manufacturing
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概要
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In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm (GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.
- 1999-11-25
著者
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Kang Sin
School Of Physics Seoul National University
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Kang Sin
School Of Electrical & Mechanical Engineering And Automation Technology Research Institute Yonse
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JANG Seok
School of Electrical & Mechanical Engineering, and Automation Technology Research Institute, Yonsei
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HWANG Hee
School of Electrical & Mechanical Engineering, and Automation Technology Research Institute, Yonsei
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WOO Kwang
School of Electrical & Mechanical Engineering, and Automation Technology Research Institute, Yonsei
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Woo Kwang
School Of Electrical & Mechanical Engineering And Automation Technology Research Institute Yonse
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Jang Seok
School Of Electrical & Mechanical Engineering And Automation Technology Research Institute Yonse
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Hwang Hee
School Of Electrical & Mechanical Engineering And Automation Technology Research Institute Yonse
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