Crystallization study of phase-change optical recording film

概要

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The crystallization properties of GeSbTe recording film prepared by rf-magnetron sputtering process were analyzed using various characterization techniques. The crystalline-to-crystalline transition occurred in the film could be confirmed. The results show that the first stage appeared in crystallization process was the meta-stable fcc phase. Consequently, the crystalline state used in practical dynamic testing was the meta-stable fcc phase, not hexagonal phase.
社団法人電子情報通信学会の論文
1997-11-20