Class D ZVS-PDM Inverter for Excimer Gas Discharge Lamp
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概要
- 論文の詳細を見る
This paper presents zero-voltage switching inverter for driving an excimer gas discharge lamp. Excimer gas discharge lamp is applied for efficient ultraviolet light generation. Ultraviolet is used now widely in semiconductor manufacturing, water treatment, plastic materials development and so forth. Class D type resonant amplifying scheme applied in this inverter provides the highest energy conversion efficiency, together with stable conditions for gas discharge in the discharge tube. Due to adjusting the working frequency higher than resonant frequency of the series resonant load, zero voltage switching conditions are achieved in this scheme. Furthermore, by using the pulse density modulation power regulation strategy, output power control of this inverter can be implemented without working frequency or pulse width changing that makes working conditions of the inverter steady and provides soft-switching operation in whole range of output power.
- 社団法人電子情報通信学会の論文
- 2002-01-09
著者
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Oleg Koudriavtsev
Power Electronics Laboratory Division Of Electrical Systems Engineering The Graduate School Of Engin
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Nakaoka M
Yamaguchi University
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NAKAOKA Mutsuo
Power Electronics Laboratory, Yamaguchi University
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Nakaoka Mutsuo
Power Electronics Laboratory Yamaguchi University
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- Class D ZVS-PDM Inverter for Excimer Gas Discharge Lamp
- Class D ZVS-PDM Inverter for Excimer Gas Discharge Lamp
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