電気化学式ガスセンサーの微小化に関する研究
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概要
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The downsizing of electrochemical gas sensors that hold an electrolyte solution with a gas-permeation membrane using microfabrication technologies was studied. These sensors can be used for sensing toxic gases down to the ppm level. The first sensor developed was a micro Cl_2 gas sensor of 5×5×3(mm). It consisted of a Pyrex glass body, Pt/Ti electrodes, a porous silicon membrane, an electrolyte solution and the other components. This sensor gave a rapid response and linearity up to the 10 ppm leve of Cl_2. The volume of the electrolyte became 1/250; Pt volumes for working and counter electrodes were 1/2500000, 1/20000, respectively, when this micro sensor was compared with commercial centimeter-size sensors. This first model sensor had a large pore-size membrane, which showed some problem concerning evaporation of the electrolyte solution. Then, a second model micro Cl_2 sensor of 3×4×1(mm) was developed. This sensor had a multi layer structure, including an original gas-permeation mechanism, and showed a reliable property to give stable signals at low concentration. A micro HCN sensor was also developed. Ag/Pt/Ti electrodes on a glass body as working and counter electrodes were newly designed and prepared. Satisfactorly good performances up to 20 ppm HCN were obtained. These sensors were the first micro electrochemical type for toxic gases. This study might have provided a possible approach to achieve micro toxic gas sensors.
- 社団法人日本分析化学会の論文
- 2003-01-05