NiMn スピンバルブ膜の交換結合磁界に及ぼす成膜条件の影響
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The unidirectional anisotropy fieds (H_<ua>) of spin valves with NiMn antiferromagnetic layers fabricated by using ion guns with various acceleration voltages (V_A) and annealed at various temperatures (T_A) were investigated.H_<ua>increased with increasing T_A and decreasing V_A. The (111) spacings (d_<111>) of NiMn antiferromagnetic layers decreased with increasing T_A and decreasing V_A. H_<ua> became higher when d_<111> approached that of θNiMn, which is an antiferromagnetic CuAuI type alloy, in spin valves both annealed at various T_A and sputtered at various V_A.Therefore, the phase transition of the NiMn layer is the dominant factor in the change of H_<ua>. Spin valves fabricated with a high V_A of 1.5kV showed a strong (111) preferred orientation and low H_<ua> after annealing at 300℃ for 3 hours. It is likely that the strong (111) orientation affects the phase transition of the NiMn layer.
- 社団法人日本磁気学会の論文
- 1998-04-15
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