樹脂層上Fe-Co基・複相非晶質磁性膜の成膜と磁性 : 薄膜インダクタ素子用軟磁性膜の特性制御

概要

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The magnetic properties and cracking behavior of a hetero-amorphous Fe_<62>Co_<21>B_<14>C_3 film sputtered onto an underlying resin (polyimide layer were investigated in order to trnsfer its intrinsic excellent soft magnetic properties on hard substrates(5 A/m for the coercive force H_c 1.6 T for the spontaneous magnetization I_s, and 1.2 kA/m for the anisotropy field H_k) to films on elastic and plastic layers. The crack density increased with tensile stress in the magnetic films, and the increase in density interchanged the directions of the magnetization easy axis and the hard axis in the film plane. With minimization of the fabrication damage to the resin layer, we obtained excellent soft magnetic properties (3-30 A/m for H_c, 1.6 T for I_s, and 1.0 kA/m for H_k) in films on a polyimide underlying layer.
社団法人日本磁気学会の論文
1998-04-15