CrW下地膜構造のCoCrTaPt膜成長へ与える影響

概要

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One of the most important characteristics required for high-density magnetic recording media is low noise. We approached the subject from the viewpoint of the magnetic layer grain size, using dark field imaging of results obtained with a transmission electron microscope (TEM). The relationship between the grain diameter distribution of the underlayer and magnetic layer in terms of underlayer thickness, substrate temperature, and the amount of W added to the Cr underlayer were investigated. The magnetic layer grain size decreased with a decrease in underlayer thickness, with an increase in substrate temperature, and a decrease in W amount in the CrW underlayer. The magnetic layer grain diameter indicated a comparatively good correlation with the media noise property.
社団法人日本磁気学会の論文
2000-04-15