マグネティック・リソグラフィーによる微細パターンの形成と光計測への応用

概要

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A new method is introduced for generating micro-topographical features in order to produce encoder scales and optical gratings. The surface on which the topography is to be produced is first made from a magnetic layer by applying a suitable surface coating, and a magnetic latent image is then recorded onto it. The surface is coated with nanometer-diameter magnetic particles dispersed in a suitable fluid containing an epoxy hardener such as magnetic fluid. The particles form a pattern on the surface, determined by the leakage of the magnetic field. After drying, the topography pattern can be fixed in position by UV light or heating. The proposed method allows the creation of various micro-topographies with fine wavelengths of up to several micrometers and various cross-sectional shapes, such as sinusoidal, saw-tooth, and rectangular. The method is quick and cost-efficient, and has many applications such as high-density bar-code, securitycode, and roughness masters.
社団法人日本磁気学会の論文
1997-08-01