RFイオンプレーティングによるTiN膜の色相-(II) (1992年秋季講演会)

概要

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Report of the last time was made on gas element influence of color of titaniumnitride films. This report shows an investigation of gas element in detail during deposition of titanium nitride films, and a study of adjustable color for titanium nitride films. Titanium nitride films were deposited by RF ion plating method. Change of gas element with time during deposition was measured by quadrupole mass spectrometer.Experimental items were change of pressure before deposition, undercoated film by titanium film and flowing oxygen gas during deposition of titanium nitride. Color of titanium nitride film deposited at higher pressure was rather dark,and undercoated film by titanium film was not changed in color as compered withnon-undercoted film. And color of titanium nitride film made by flowing a little oxygen gas was rather bright. I think that color of titanium nitride films can be adjusted from dark color tobright color by flowing oxygen gas under adequate condition.
社団法人日本時計学会の論文
1993-06-20