Large Area Fabrication of Co Particles by Ion-Beam-Induced Chemical Vapor Deposition (IBICVD)
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概要
- 論文の詳細を見る
Co particles were fabricated by means of a focused ion beam (FIB) system with dicobalt octacarbonyl precursor. Precursor vapor was introduced into the specimen chamber and irradiated with a Ga^+ ion beam having a diameter of several tens of nanometers through vector scan rastering. An attempt was made to confirm the effect of a single beam incidence on the Co dot size.
- 社団法人日本磁気学会の論文
- 2004-02-01
著者
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SUZUKI T.
Information Storage Materials Laboratory, Toyota Technological Institute
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Kageyama Y.
Information Strage Materials Laboratory Toyota Technological Institute
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