MFM Images and Micromagnetic Simulation of Submicron-Sized Single-Crystal Co particles

概要

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Submicron-sized Co particles were fabricated by patterning single-crystal Co thin films, and their magnetic domain structures were observed by magnetic force microscopy (MFM). The Co films (250 nm in thickness) were epitaxially deposited onto Al<SUB>2</SUB>O<SUB>3</SUB> (001) single-crystal substrates by electron beam evaporation, and from thesefilms (with their c-axis parallel to the surface normal) circular dots with diameters of 0.5, 1, and 2.5 1μm were patterned by electron beam lithography and Ar ion beam etching. All the dots fabricated proved to suffer from side wall etching, resulting in cone shapes in the case of 0.5μ and 1μm diameters. In dots with diameters of 1 and 2.5μm, maze patterns in domain structure were clearlμEobserved, whereas concentric contrast became dominant in 0.5μm dots. Numerical simulation based on the Landau-Lifshitz-Gilbert equation revealed that these dotspossess components of both perpendicular and vortexmagnetization simultaneously.
社団法人日本磁気学会の論文
2005-05-01