3514 光造形を用いたマイクロ部品の製作

概要

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The aim of this work is the development of a photoforming process for fabricating microparts used in a micromachine system. The high precision photoforming system is constructed, in which variations of machining parameters, such as UV laser power, laser scanning velocity and laser beam radius, that affect the accuracy of microparts are controlled as small as possible. It is confirmed that simple shaped micro-structured parts, such as a cube and a cylinder in the order of 100μ m in size, can be fabricated with the accuracy of the order of a few μ m using this system. Furthermore, a new method for solving the problem that solidified objects adhere to a window is proposed and by applying this method to this photoforming process a micro-gear (PCD 3mm) is successfully fabricated.
一般社団法人日本機械学会の論文
2000-07-31