MMT-07 NANO-SERVOMECHANICS OF A MEMS DEVICE FOR AFM-BASED STORAGE TECHNOLOGY
スポンサーリンク
概要
- 論文の詳細を見る
Nanoscale mechanics and servo control of a MEMS-based scanner device are considered for two-dimensional motion generation. A servo structure is dedsribed that augments a conventional control algorithm, including a digital proportional-integral-derivative type, so that the significant stiffness characteristic of a MEMS-based scanner is neutralized by means of a stiffness-compensation method. This approach has been verified experimentally.
- 一般社団法人日本機械学会の論文
著者
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Lantz Mark
Ibm Research Zurich Research Laboratory
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SRIJAYANTHA Sri
IBM Research, T. J. Watson Research Center
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DANG Hien
IBM Research, T. J. Watson Research Center
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SHARMA Arun
IBM Research, T. J. Watson Research Center
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ELEFTHERIOU Evangelos
IBM Research, Zurich Research Laboratory
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POZIDIS Haralampos
IBM Research, Zurich Research Laboratory
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Sharma Arun
Ibm Research T. J. Watson Research Center
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Dang Hien
Ibm Research T. J. Watson Research Center
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Eleftheriou Evangelos
Ibm Research Zurich Research Laboratory
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Pozidis Haralampos
Ibm Research Zurich Research Laboratory
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Srijayantha Sri
Ibm Research T. J. Watson Research Center
関連論文
- MMT-07 NANO-SERVOMECHANICS OF A MEMS DEVICE FOR AFM-BASED STORAGE TECHNOLOGY
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