104 エリプソメトリー顕微鏡による磁気ディスク表面のナノ分子潤滑膜の可視化

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概要

• 論文の詳細を見る

• Direct visualization method for molecularly thin lubricant films on magnetic disks is presented. Visualization of a molecularly thin film is an extremely useful technique for the investigation of replenishment and retention of thin lubricant films. Ellipsometry can provide thickness and refractive index of a molecularly thin film. However, conventional ellipsometry requires the laser spot to be scanned in order to image a lubricant film, since it can provide information of only one point of a sample surface. In this report, direct visualization method based on ellipsometry is presented. In our elllipsometric microscope, ellipsometric information of a sample surface is converted into dark-bright contrast and is directly visualized with a chilled CCD camera. By the combination of optical and digital image processing techniques, weak contrast are enhanced and interference noise caused by laser coherence are reduced. Thus, our method can provide direct visualization of 1-nm order thick thin lubricant film.

• 2002-03-22

著者

• 福澤 健二

  Nagoya University

• 三矢 保永

  Nagoya University

• 野田 友博

  Nagoya University

関連論文

• 2811 DETF型共振器を用いたカセンサの開発(J20 マイクロナノ理工学,2005年度年次大会)
• エリプソメトリー顕微鏡によるナノ分子膜の膜分布の定量観測(マイクロナノ理工学,IIP2004 情報・知能・精密機器部門講演会)
• 104 エリプソメトリー顕微鏡による磁気ディスク表面のナノ分子潤滑膜の可視化

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