106 第2金属元素がチタン系窒化物薄膜の微小硬度および微構造に及ぼす影響(表面改質の技術と特性(2))(OS.10 表面改質の技術と特性)

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Ti_1-xAlxN, Ti_1-xCrxN and Ti_1-xZrxN films were synthesized differing contents, x, by the arc ion plating (AIP) method and investigated on micro-hardness, lattice parameter and morphology. The crystal structure of Ti_1-xAlxN films changed from the NaCl into wurtzite type at x=0.6〜0.7, while Ti_1-xCrxN and Ti_1-xZrxN were kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti_1-xAlxN and Ti_1-xCrxN monotonously decreased from 0.423 nm(x=O) down to 0.415 nm (x=0.6) and to 0.416 nm (x=1.0), respectively. 0n the other hand, the lattice parameters of Ti_1-xZrxN films monotonously increased from 0.423 nm (x=O) up to 0.458 nm (x=1.0). The maximum micro-hardness of Ti_1-xAlxN, Ti_1-xCrxN and Ti_1-xZrxN films were Hv 3200 (x=0.6), 3200 (x=0.2) and 3000 (x=0.5), respectively. TEM observation showed Ti_1-xAlxN with X≤O.6 had columnar structure with grain size of 〜200 nm. Ti_1-xAlxN with X≥0.7, had homogeneous structure, consisted of grain size of 〜20 nm and that of 〜200 nm. 0n the other hand, Ti_1-xCrxN and Ti_1-xZrxN had columnar structure with grain size of 〜200 nm.
一般社団法人日本機械学会の論文
2001-03-09