TED-AJ03-267 A THERMAL RADIATION SPECTROSCOPY TECHNIQUE FOR DIAGNOSIS OF TEMPERATURE AND MICROSTRUCTURE OF REAL SURFACES

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Surface microstates of real surfaces of solid materials change in actual industrial environments, and also they are changed in surface processings positively. A real time diagnosis technique for the surface microstate should be developed for the successive process control. Thermal radiation spectroscopy technique is promising for this problem. The authors have developed a wide-spectral-range high-speed spectrophotometer system, which measures spectra of reflection and emission of radiation in the visible through infrared region of wavelength 0.3∿11μm with a cycle time of 2s. In this paper we present a diagnosis technique for temperature and microstructure of real surfaces on a basis of the performance of this hardware. Ideas for the algorithm of the diagnosis technique are as follows. With respect to the temperature, the surface state of a real surface is unstable, and the emittance is unknown and changing. First, an idea of spectral pyrometer is adopted to deal with radiation infromation at a number of wavelengths. Second, an active technique is adopted, in which the target surface is irradiated and reflection is measured as well as the self-emission of the surface. Third, an energy ratio of the specular-hemispherical reflection at the rough real surface is dealt from a heat transfer science point of view. With respect to the microstructure, first, a simple and non-sophisticated optical/surface model is presented for the surface diagnosis. Second, a special attention is paid to the minima and maxima of radiation interference at the surface film with rough interfaces to estimate the thickness of the surface film. Third, another attention is paid to the diffraction of radiation in a particular direction to estimate the roughness of the surface film. An experimental examination is made on a metal surface in a high-temperature air-oxidation process to verify the performance of the algorithm (Figure A). Spectra of emission energy u and reflection energy v of radiation in a region of wavelength λ=0.75∿11μm are measured at every 2s. The spectra are analyzed to estimate the time transition of surface temperature T^<opt>, spectra of emittance ε_N^<opt> and reflectance R_<NN> of the surface, reflectance ratio β of the surface, average thickness d and rms roughness σ_1 of the surface film. The followings have been concluded. The surface temperature of an order of 1100K is estimated within an inaccuracy within 10K. The thickness d is estimated in a region of d=0.08∿3.8μm and with a precision of (⊿d/d)=0.02. The roughness σ_1 is estimated in a range of σ_1=0.01∿0.71μm. Reality of a new non-contact in-process diagnosis technique for temperature and microstructure of real surfaces has been demonstrated.[figure]
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TED-AJ03-267 A THERMAL RADIATION SPECTROSCOPY TECHNIQUE FOR DIAGNOSIS OF TEMPERATURE AND MICROSTRUCTURE OF REAL SURFACES

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