812 イオンミキシング蒸着法によるTiN薄膜の摩擦摩耗(GS-11 摩擦・摩耗)

概要

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Titanium nitride (TiN) thin coating with a thickness of 1 μm was formed on a stainless steel (SUS304) substrate by an ion mixing and vapor deposition (IVD) technique. Friction and wear behavior of the TiN coating against a silicon nitride (Si_3N_4) ball was examined with a reciprocated sliding test in air. Hardness of TiN and Si_3N_4 was almost comparable, and then both materials were worn together in the present friction process. A gradual removal of the TiN coatings was a dominant wear behavior. No catastrophic film failure was observed. Such a wear mode provides an evidence for the strong bonding of the TiN coating to the substrate. In the present IVD coating process, by evaporation of Ti and simultaneous irradiation of N ions to the substrate, a mixing layer having superior bonding strength could be formed, leading to a high wear resistance.
一般社団法人日本機械学会の論文
2001-03-16