PROFILE AND SURFACE MEASUREMENT TOOL FOR HIGH ASPECT-RATIO MICROSTRUCTURES

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概要

• 論文の詳細を見る

• A MEMS device for the measurement of profile on high aspect-ratio microstructures has been developed. The goal was to develop a method to be used when the known methods were inappropriate. The main part of the tool is a silicon micro-probe with a sharp tip at its end and an integrated piezoresistive strain gauge sensor. The probes are from 500μm to 1mm long with a cross section area of 20×20(μm)^2; they were mainly designed for the characterization of narrow and deep "EDM" micromachined micro-holes having a radius as small as 50μm and a depth up to 800μm. The profile measurement method has been extended to the characterization of several other microstructures. The measurement accuracy is around ±30nm.

• 社団法人日本機械学会の論文

著者

• Jalabert Laurent

  Cnrs-iis And Cirmm University Of Tokyo

• Jalabert L

  Univ. Tokyo Tokyo Jpn

• Pourciel Jean

  LIMMS

• Masuzawa Takahisa

  LIMMS

• Masuzawa T

  Univ. Tokyo Tokyo Jpn

関連論文

• PROFILE AND SURFACE MEASUREMENT TOOL FOR HIGH ASPECT-RATIO MICROSTRUCTURES
• Profile and Surface Measurement Tool for High Aspect-ratio Microstructures(Advances in Motion and Vibration Control Technology)
• EFFECT OF MAGNETIZATION ORIENTATION AND MAGNETIC BIAS FIELD IN A MAGNETOSTRICTIVELY-ACTUATED, SILICON-BASED MICROACTUATOR

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