OS1(4)-17(OS01W0437) Micro-Components Evaluation Using Optical Techniques
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概要
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Current trends in miniaturization of micro-electro-mechanical systems (MEMS) require the use of smaller and smaller components. Development of those micro-components requires test and measurement methodologies to inspect the deformations of the micro-components for further understanding of their mechanical behaviour. In this paper we have developed optical techniques for measuring deformation and 3-D surface profile of micro-components. Theoretical models based on the Newton's ring, fringe projection and Michelson interferometry were developed. The techniques essentially use the light interferometry where light beams or fringe patterns are projected onto a component under evaluation. As a result of light interference on the component surface various fringe patterns are observed. The fringe patterns which contains information on the component's surface deformation or characteristics are captured with a CCD camera incorporated with a microcopy system. Subsequent image processing and analysis of the results are carried out using phase-shifting or fast Fourier transform (FFT) methods. The theoretical models have been successfully verified with experimental work carried out on various micro-components including micro-accelerometer, miniature microphone, micro-mirrors, micro-radio-frequency switch and micro-lens array. The proposed methods are potentially applicable to in situ inspection of micro-components in MEMS.
- 一般社団法人日本機械学会の論文
- 2003-09-09
著者
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Tay C.
Dept. Of Mechanical Engineering National Univ. Of Singapore
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Quan Chenggen
Dept. of Mechanical Engineering, National Univ. of Singapore
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Wang S.
Dept. of Mechanical Engineering, National Univ. of Singapore
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Quan Chenggen
Dept. Of Mechanical Engineering National Univ. Of Singapore
関連論文
- OS1(2)-5(OS01W0438) Phase Shifting Technique for Closed-Fringe Analysis by Fourier Transform Method
- OS1(4)-17(OS01W0437) Micro-Components Evaluation Using Optical Techniques
- SB-06-1(012) The Effect of Microstructural Morphology of Steel on Threshold Stress in Creep(Changes in Microstructure 1)