超音波の機械計測への応用 : 第1報,40kHz超音波による変位測定

概要

論文の詳細を見る
This paper shows the principle and accuracy of the displacement measuring method which has two 40 kHz ultrasonic wave sensors. This measuring device measures the distance from an object by the phase change difference as the ultrasonic wave moves back and forth from the senser to an object. This method has the special merit of obtaining the most accurate measurement with simplest device. Accuracy of better than 1 μm is obtained. At the end of this study, this separated ultrasonic wave probe method is applied to measure the displacement of the gringing head, and is compared with the electric micrometer. As the experimental result, it is found that this new method is almost as practical as conventional measuring methods, like the electric micrometer.
一般社団法人日本機械学会の論文
1985-12-25