超精密加工支援のための二重構造シェルターの開発

概要

論文の詳細を見る
Recently, as an electronic and an optical part with ultra precision are required, the research about nano technology is done very much ; those are an ultra precision machining such as an ion beam machining and an ultra precision measurement such as STM technology. Nano technology is influenced from the vibration and temperature change of the device and peripherals. However, the research in order to reduce an ambient temperature fluctuation and the thermal drift of the device isn't done very much. Therefore, in this report, a shelter with dual structure for supporting ultra precision machining has been devoloped. The shelter consist of an inner and an outer shelter with vacuum condition and compulsory cooling. In the experiment, temperature and heat transfer coefficient fluctuations in the shelter were measured, and the thermal stability in the shelter was evaluated. It is concluded from the results that(1)the proposed shelter structure are very effective in order to reduce ambient temperature fluctuation and heat transfer coefficient fluctuation in the shelter. (2)the developed shelter are useful for supporting ultra precision machining.
一般社団法人日本機械学会の論文
2000-03-25