高精度加工を支援する発泡スチロール製シェルタの開発 : 地球環境保全のための省エネルギー対策

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Recently, as an electronic and an optical part with high precision are required, the research about nano technology is done very much; those are an ultra precision machining such as an ion beam machining and an ultra precision measurement such as STM technology. Nano technology is influenced from vibration and temperature change of the device and around the device. However, the research in order to reduce an ambient temperature fluctuation and the thermal drift of the device is not done very much. On the other hand, in the 21st century, it is also important to be careful on conservation of energy for protecting the earth. Therefore, in this report, a shelter with conservation of energy for supporting high precision machining was developed. At first, some properties of isolator using two kinds of styrol foams are investigated for shelter design. Next, a simple shelter using those styrol foams is manufactured. At last, in the experiment, temperature fluctuation and heat transfer coefficient fluctuation in the shelter were measured, and the thermal stability in the shelter was evaluated. It is concluded from the results that (1) the proposed shelter structure are very effective in order to reduce ambient temperature fluctuation. (2) the developed shelter is useful for supporting high precision machining and measurement. (3) this shelter is very simple, easy and low cost for setting, and running cost isn't need.
公益社団法人精密工学会の論文
2001-07-05

高精度加工を支援する発泡スチロール製シェルタの開発 : 地球環境保全のための省エネルギー対策

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