クリーンルームの補機室面積と総配管長の最小化問題に対するSA法の適用(機械要素,潤滑,工作,生産管理など)

概要

論文の詳細を見る
Semi-conductor manufacturers are aiming at saving initial cost (construction and land cost) and maintenance expenditure that are incurred in proportion of the clean room area. Especially for the 300 mm wafer factory, the equipments tend to be enlarged. The clean room area should be reduced to decrease construction cost by expelling the auxiliary machines out of the clean room. The auxiliary machines should be located compactly in order to minimize footprint under the clean room, and pipe length. We propose a "3 dimensional Maze method" applied algorithm to minimize total pipe length. In this research, at the auxiliary machine room of the downstairs of a clean room, the auxiliary machine arrangement problem which considered piping is modeled. We propose a new method to minimize auxiliary machine area and the total pipe length simultaneously. Simulated Annealing are used as the technique of optimization. Numerical examples demonstrate effectiveness of proposed algorithm
一般社団法人日本機械学会の論文
2003-03-25