逆解析手法による薄膜弾性定数の同定 : インデンテーション法におけるデータサンプリングに関する考察

概要

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This paper describes a method for evaluating material properties of multilayered system from data obtained by indentation testing. The measurement information collected from the penetration force-depth curves are employed for identifying elastic moduli of thin films. The axisymmetric indentation problem is first analyzed on the basis of the three-dimensional axisymmetric elasticity theory. Then, an analysis of an elastic contact problem, in which an elastic axisymmetric indenter penetrates an elastic half-space coated with multilayered thin films, is presented. Next, an inverse procedure for determining Young's modulus, Poisson's ratio of thin films and radius of the contact area is described under the condition that the elastic moduli of the substrate and indenter, and thicknesses for layers are known. For an inverse analysis using the complex method, effective sampling of data obtained by penetrating indenters with various radii of curvature into the coated substrate is presented.
一般社団法人日本機械学会の論文
1996-02-25