La_2O_3-TiO_2系多孔質ガラスセラミックスの湿度センサーへの応用

概要

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The sodium borate glass system containing La2O3 and TiO2 shows a marked trend toward microphase separation after heat treatment, resulting in water-soluble sodium borate and water-insoluble La2O3-TiO2 ceramic phases. Then La2O3-TiO2-rich skeletons can be obtained by leaching out the sodium borate phase. The application of thus obtained porous glass-ceramics with interconnected pores to a humidity sensor is of interest. Microstructure, such as surface area and pore size distibution, of the La2O3-TiO2 glass-ceramic system is sensitive to the heat treatment and the subsequent leaching conditions, so that the humidity sensitivity of the element can be controlled favorably by the phase separation. The element, heat-treated at 600℃ for 12h followed by leaching at 85℃ for 34h, exhibits the most excellent humidity sensitive characteristics. The humidity sensitive characteristics of this element is superior to that of the element with the same composition of the leached La2O3-TiO2 glass-ceramic prepared by solid phase reaction.
社団法人日本セラミックス協会の論文
1987-07-01