Si_3N_4-TiN多孔質セラミックス(第1報) : 微細構造と水分雰囲気下の電気特性

概要

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Porous ceramics were produced by pressureless sintering green compacts composed of Si_3N_4 and TiN powders without additives in nitrogell gas atmosphere at 1700 ℃. The microstructure and electrical-properties of the Si_3N_4-TiN porous ceramics ill a hurnid atmosphere were investigated. The following results were obtained: (1) The pore size distribution showed a sharp peak at 2000Å. (2) Rod-like shaped crystals of Si_3N_4 and equiaxed crystals of TiN distributed uniformly in the matrix. A large number of Si_3N_4 fibers of about 5 μm were observed for 50 wt% TiN. (3) The pore volume and specific surface area decreased proportionally with increasing amount of TiN. However, anomaly in the pore volume and specific surface area was observed at 50 wt% TiN. (4) A sharp decrease in the impedance was observed in a dry atmosphere from 1 x 10^7 to I x 10^3 Ω・cm for ceramics containing 40-60 wt% TiN. (5) The impedance dependence of humidity was observed for ceramics in impedance higher than 10^5 Ω・cm (less than 40 wt% TiN content) . In a high humid atmosphere, the impedance decreased with increasing specific surface area.
社団法人日本セラミックス協会の論文
1992-05-01