市販96%アルミナ基板上における厚膜抵抗体の抵抗値の変動とその原因

概要

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Commercial 96% alumina substrates were evaluated. Nine commercial resistor pastes were printed and fired on seven commercial substrates and a sapphire plate, and the relation between sheet resistance and substrate properties was studied. The fluctuation in sheet resistance for low- and medium-resistance pastes was 30%, but that for high-resistance pastes was 10%. A high correlation was observed between sheet resistance and fired density of the substrates, and the correlation with SiO_2 and MgO contents was medium. No significant correlation of sheet resistance with grain size, surface roughness, thermal expansion coefficient and CaO content was observed. RuO_2-based resistors and pyrochlore-based resistors showed an opposite tendency; the substrate which gave a minimum resistance for RuO_2-base resistors yielded a maximum resistance for pyrochlore-base resistors, and vice versa. The resistance variation for RuO_2-resistors has been attributed to the local concentration of conductive particles, whereas that for pyrochlore-base resistors to the decomposition of pyrochlore to RuO_2. In both cases the resistance variation has been interpreted as a function of glass-substrate interaction.
社団法人日本セラミックス協会の論文
1992-08-01