Polytypism and Amorphousness in Silicon Whiskers

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概要

• 論文の詳細を見る

• New form silicon crystallirte whiskers with polytypism have been grown bythermal decomposition of silane in an argon atmosphere at around 500'C on thegold plated surface of silicon crystal. Each whisker has a straight filamentaryshape less than 1000 A in diameter and several htundred microns in length for 40minutes operation. It was found from the eIectro?t diffraction patterns that mostof them can be deduced as having a 6H structure (hexagonal, n=3.84A and c18.59 A). Besides, the existence of some long-period structures was discovered onthe diffraction patterns though they are not very common. A whisker grown atabove 520'C has an outer crust of amorphous silicon. Raising the growth tempera-ture converts these whiskers into fully amorphous ones. At above 800'C, normalwhiskers with a diamond structure have been obtained. l'he structure of theamorphous whisker grown at intermediate temperature range can be accountedfor by the mixture of diamond type and 6H type micro crystals.

• 社団法人日本物理学会の論文
• 1978-01-15

著者

• Miyamoto Yoshinari

  Department Of Adaptive Machine Systems Graduate School Of Engineering Osaka University

• Miyamoto Y

  Department Of Nano Micro Structure Control Smart Processing Research Center Joining And Welding Rese

• Miyamoto Yoshinari

  Department Of Physics College Of General Education Osaka University

• HIRATA Mituji

  Department of Physics,College of General Education,Osaka University

• Hirata Mituji

  Department Of Physics College Of General Education Osaka University

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