Electron Energy Loss Spectroscopy with subnanometer Spatial Resolution on Compositionally Modulated TiN_x Multilayers

概要

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Coutapositionally rnodtrlated TIN. rnultilayers (0.3< x< 1, with a period of 8 nna) are in-vestigated by spatially resolved electron energy loss spectroscopy with a 0.5 nnu incident probe,in order to investigate systetnatically the evoltrtion of the electronic strtncttrre as the nitrogenconcentration varies. The difference in lcinding energy between Ti L and N K edges decreasesstrbstantially as the nitrogen concentration changes frorn the stoichiometric valvre (.lZll t l) towardsa non-stoichiounetric one (r t 0.3). This can be explained by a re-distribtttion of the charge fronuthe removed nitrogen to the surrounding titaniuna atoms. Furthermore the titaniurn L3 peak,so-called white line, broadens in accordance with the nitrogen concentration, due to a changein the d band occtrpation. A shift of the voltrme plasma frequency towards lower energies whenthe nitrogen vacancy concentration increases is observed and explained in ternas of' a simplefree-electron gas model. These results deunonstrate the great power of spatially resolved electron energy loss spectroscopy as a probe of electronic structure with sul*nanometer-scale spatialresoltntion.
社団法人日本物理学会の論文
1997-07-15