Crystallization of Amorphous Titanium Dioxide Films Prepared by Vacuum-Evaporation

概要

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An electron microscopy and electron diffraction study was made on the structure of vacuum-deposited films of titanium dioxide. The films were amorphous when they were deposited on rocksalt at room temperature. When irradiated by an intense electron beam, the amorphous films crystallized in anatase and rutile forms. The rutile crystallities were small granules, whereas the anatase crystals grew to occupy larger areas of several microns in linear dimension. The difference in structure of the crystallized films seemed to be originated in the intrinsic properties of the amorphous films. The generation of dislocations which constituted small angle grain boundaries was observed in growing anatase crystals. In these crystals, twins were formed on the {112} planes and dislocations were also observed in the individual grains.
社団法人日本物理学会の論文
1966-02-05