Electron Microscopic Observation on Heat Oxidation of Vacuum-Deposited Aluminium Films

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概要

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• It was found by electron microscopy that three kinds of oxides were formed on aluminium films by heat oxidation in air in addition to amorphous oxide forming a protective layer. They were morphologically different: (A) flower-like amorphous oxide, (B) plates of a single crystal of γ-Al_2O_3, and (C) dendrite crystals of γ-Al_2O_3. At 400℃ type-A, at 500℃ type-A and type-B, and at 600℃ type-C as well as type-B were formed. They all appeared preferentially at grain boundaries of the aluminium films. It is supposed that surface irregularities of the metal play an important role in the formation of these oxides.

• 社団法人応用物理学会の論文
• 1966-12-15

著者

• Shiojiri Makoto

  Institute For Chemical Research Kyoto University

• Suito Eiji

  Institute For Chemical Research Kyoto University

• Morikawa Hiroshi

  Institute for Chemical Research, Kyoto University

• Morikawa Hiroshi

  Institute For Chemical Research Kyoto University

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