三次元測定機用タッチ信号プローブの着座機構の開発

概要

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This paper presents a development of a reseat module which is included in a fast and accurate touch trigger probe for coordinate measuring machines (CMM). In general, the reseat module absorbs contact force for safety and repositions the probe stylus. A "six-point-oontact-reseat-mechanism" is conventionally used as the reseat mechanism. The elastic deformation of the six contact points varies according to the stylus touchback motion, and a dispersion of the elastic deformation brings the dispersion of the reseat position. The dispersion of the conventional reseat position is shown theoretically and experimentally. Both dispersions reach 1μm order in the conventional one. A new reseat mechanism installed radially three piezo-elements improves the dispersion by resetting the elastic deformation. This structure is called High Reseatabilty Mechanism (HRM). The dispersion is improved a 0.2μm order after the HRM operation.
2000-02-05