ホログラフィ等傾角干渉じまによる変位測定

概要

論文の詳細を見る
Fringe counting techniques are often used in modern laser interferometers for measuring displacement. These interferometers are essentially integrating devices, where the displacement is derived from an accumulated fringe count, that is, they measure travel rather than static displacement. If the interferometer optical paths are interrupted during a measurement cycle, the reference for the instrument is lost and accuracy suffers. In this paper, a holographic technique whereby displacement is measured by analyzing a fringe pattern localized at infinity which is equivalent to Haidinger or Brewster fringes in conventional interferometry is described. The phase distribution of the fringe pattern is measured to high accurcy using phase-stepping interferometry, and then analyzed by computer. Using this technique, in-plane displacements could be measured with an accurancy of about 0.2μm whilst the accuracy for out of plane displacements was about 2μm.
公益社団法人精密工学会の論文
1993-02-05