圧電駆動機構のための拡大機構とその応用

概要

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This paper describes a magnifying mechanism utilizing a flexure-hinged linkage, which was devised specifically for use on accurate mechanisms driven by a piezoelectric stack. The principle of operation is similar to that of the slider-crank mechanism, and a high magnification is obtained by a suitable choice of parameters defining the initial geometry of linkage. The machanism devised is applied to two types of piezo-driven mechanism, a translation mechanism and a rotation mechanism, and the performance characteristics are tested to assess the usefulness of the mechanisms. The decrease in magnification, which is caused by a streching of flexure hinge resulting from the driving force of mechanism, is investigated in full detail, and the validity of theoretical analysis is examined by experiment. A brief description of the accuracy of motion of the translation mechanism is included.
社団法人精密工学会の論文
1991-08-05